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As the national metrology institute (NMI), we are focusing on the development and dissemination of measurement standards, promotion of measurement standards utilization, development of measurement technologies related to measurement standards, legal metrology work and training of experts. Our activity covers engineering, physical, material, and chemical measurement standards. It also covers development of measurement and analytical instrumentation. We also coordinate international activities on metrology standards as a national representative.
AIST researchers, in collaboration with Techno Probe Co., Ltd and Keysight Technologies, Inc., have developed a system for universally evaluating the high-frequency characteristics of surface mount power devices with various electrode shapes. Power devices are semiconductor devices that efficiently convert and control electric power by switching large currents on and off at high speeds. They are used in various fields including electric vehicles, railroads, solar power generation, and home appliances. Operating at high switching frequencies makes it possible to reduce the size of power devices, inductors, capacitors, and other components, and is expected to ultimately lead to smaller and lighter systems. To design circuits that operate at high switching frequencies, information on S-parameters, which represent the reflection and transmission of high-frequency signals, is useful. AIST, Techno Probe Co., Ltd and Keysight Technologies, Inc. have developed a probe that converts coaxial into planar electrodes for surface mount power devices and a probe station to control the probe. The developed probes are compatible with the geometry of multiple types of electrodes and can measure S-parameters from 50 kHz to 1 GHz. This is expected to contribute to the development of compact and lightweight power electronic systems for high switching frequencies operation. This newly developed probe allows for easier and less expensive S-parameter measurement. The developed probe and probe station will be launched for sale by Techno Probe Co., Ltd for the Japanese market and by T Plus Co. Ltd. for the overseas market.
S-parameter measurement of power devices using the developed probe
Researchers at AIST, in collaboration with Panasonic Production Engineering Co., Ltd., have developed a sphere diameter measurement technology that achieves the world's highest level of accuracy. In recent years, in fields where high-definition images are essential, such as in-vehicle cameras and endoscopes, optical components increasingly adopt free-form geometries to enhance optical performance. For free-form lenses and mirrors, it is crucial not only to minimize surface profile deviation to the nano-level but also to ensure that the absolute shape, including the radius of curvature, aligns with the design shape at the nano-level. Achieving this requires not only nano-level processing technology but also shape measurement technology that matches or surpasses the precision of nano-level processing. The accuracy of absolute shape measurement in profilometers of optical components such as free-form lenses and mirrors, depends on the calibration accuracy of the sphere diameter used as a reference for the measuring instrument. Until now, the calibration accuracy of sphere diameter has had an uncertainty of approximately 100 nm to 200 nm, which is not superior to the measurement resolution and repeatability of free-form surface profilometers. In this study, we developed a sphere diameter calibration method using a micro-coordinate measuring machine (µ-CMM) equipped with a low-contact force probe system and a silicon gauge block as the reference. This method enabled measurement of sphere diameters with an uncertainty of 15 nm. By using this sphere as a reference for free-form surface profilometers, it is expected to improve the accuracy of free-form surface measurements. Details of this research were published in Precision Engineering on December 7, 2024.
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