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AIST:Vocabulary for Surface Chemical Analysis (ISO 18115:2013.)

The surface chemical analysis vocabulary provides the definitions for some 900 surface chemical analysis terms in the two ISO International Standards:

1) ISO18115-1:2013(E) – Surface chemical analysis – Vocabulary –Part 1,
    General terms and terms used in spectroscopy

2) ISO18115-2:2013(E) – Surface chemical analysis – Vocabulary – Part 2,
    Terms used in scanning-probe microscopy

These documents, available from ISO (International Standards Organization in Geneva) or your National Standards Body, cover the terms used in surface analysis spectroscopies such as Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS) and many similar methods as well as in the scanned probe microscopies (SPM) such as atomic force microscopy (AFM), scanning near-field optical microscopy (SNOM), scanning tunnelling microscopy (STM) and many similar methods.

The PDF files for these ISOs can be downloaded at the ISO portal.

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Permission has been granted by ISO for public access to ISO 18115-1 and ISO 18115-2 for educational and implementation purposes through eight approved websites at the National Physical Laboratory (UK), the American Vacuum Society (USA), the Environmental Molecular Sciences Laboratory (USA), the Surface Analysis Society of Japan (Japan), the National Institute of Advanced Industrial Science and Technology (Japan), the Bundesanstalt fur Materialforshung und–prufung (Germany), the National Metrology Institute of Germany (Germany) and the Spanish Vacuum Society (Spain).


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