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Research paper : High quality and large-area graphene synthesis with a high growth rate using plasma-enhanced CVD (M. Hasegawa et al.)−137−Synthesiology - English edition Vol.9 No.3 (2017) 157, C52–C60 (2010). [39]R. M. Souto, V. Fox, M. M. Laz, M. Pérez and S. González: Some experiments regarding the corrosion inhibition of copper by benzotriazole and potassium ethyl xanthate, J. Electroanaly. Chem., 411, 161–165 (1996).[40]H. Kinoshita, M. Umeno, M. Tagawa and N. Ohmae: Hyperthermal atomic oxygen beam-induced etching of HOPG (0001) studied by X-ray photoelectron spectroscopy and scanning tunneling microscopy, Surf. Sci., 440, 49–59 (1999).[41]T. Terasawa and K. Saiki: Growth of graphene on Cu by plasma enhanced chemical vapor deposition, Carbon, 50, 869–874 (2012). [42]T-H. Han, Y. Lee, M-R. Choi, S-H. Woo, S-H. Bae, B. H. Hong, J-H. Ahn and T-W. Lee: Extremely efcient exible organic light-emitting diodes with modied graphene anode, Nat. Photon., 6, 105–110 (2012).[43]T. 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Pimenta: General equation for the determination of the crystallite size La of nanographite by Raman spectroscopy, Appl. Phys. Lett., 88, 163106-1–163106-3 (2006).AuthorsMasataka HasegawaCompleted the doctor’s program at the Graduate School of Engineering, Kyoto University in 1990. Joined the Electrotechnical Laboratory, Agency of Industrial Science and Technology in 1990. Currently, Group Leader, Carbon-Based Thin Film Materials Group, Nanomaterials Research Institute, AIST. General Manager, Graphene Division Project Headquarters, Technology Research Association for Single Wall Carbon Nanotubes (TASC) from 2011 to present. Engages in the R&D for electroconductivity control of diamond semiconductor, CVD growth on monocrystal diamond, CVD synthesis of nanocrystal diamond thin film, and CVD synthesis for graphene. In this paper, was in charge of overseeing the overall research topics and the development of plasma CVD device for graphene and its synthesis method.Kazuo TsugawaGraduated from the Department of Electronics and Communication Engineering, School of Science and Engineering, Waseda University in 1992. Withdrew from the doctor’s program at the Department of Electronics, Information and Communication Engineering, Graduate School of Science and Engineering, Waseda University in 1998. Assistant, School of Science and Engineering, Waseda University from 1998 to 2000. Researcher, Japan Fine Ceramics Center from 2000 to 2003; Postdoctoral Fellow and Technical Staff at the Research Center for Advanced Carbon Materials, Nanocarbon Research Center, and CNT Application Research Center, AIST from 2003 to 2011; and Researcher, Graphene Division, Technology Research Association for Single Wall Carbon Nanotubes from 2010 to 2013. Part-time Lecturer, Faculty of Science and Engineering, Waseda University from 2010 to 2013. Application Manager, Seki Diamond Systems, Cornes Technologies Ltd. from 2013 to present. Doctor (Engineering). In this paper, was in charge of the CVD synthesis of graphene and its evaluation.Ryuichi KatoGraduated from the College of Engineering Sciences, University of Tsukuba in 2008. Withdrew from the master’s course at the Department of Materials Science, Graduate School of Pure and Applied Sciences, University of Tsukuba in 2011. Currently enrolled in the doctor’s program at the Department of Materials Science, Graduate School of Pure and Applied Sciences, University of Tsukuba. Researcher, Graphene Division, Technology Research Association for Single Wall Carbon Nanotubes (TASC) from 2011 to present. In this paper, was in charge of the development of plasma pretreatment technology for graphene copper substrate using helium, and the synthesis and analysis of double-layered graphene using low-concentration carbon source.Yoshinori KogaGraduated from the Department of Applied Chemistry, Faculty of Science and Engineering, Waseda University in 1969. Withdrew from the doctor’s program at the Department of Applied Chemistry, Graduate School of Science and Engineering, Waseda University in 1974. Joined the Government Chemical Industrial Research Institute, Tokyo, Agency of Industrial Science and Technology in 1974. Doctor (Science) in 1974. Deputy Manager, Planning Office and Section Chief, Polymer Analysis Section, National Chemical Laboratory for Industry. Manager of Molecular Measurement Laboratory and Manager of Laser Reaction Lab, National Institute of Materials and Chemical Research in 1993. Deputy Director, Research Center for Advanced Carbon Materials, AIST from 2001 to 2008. Part-time Lecturer, Graduate School of Science and Technology, Nihon University from 2010 to 2014; and Part-time Lecturer, Graduate School of Engineering, Mie University from 2015 to present. Researcher, Graphene Division, Technology Research Association for Single Wall

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