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Research paper : Development of a pressure sensor using a piezoelectric material thin film (M. Akiyama et al.)−179−Synthesiology - English edition Vol.5 No.3 (2012) Sensitivity Thin Film Pressure Sensor Coalition in 2001-2003. Assistant professor of the Graduate School, Saga University in 2003-2006. Part-time lecturer at the Kyushu University in 2011. Leader of research team, Measurement Solution Research Center, AIST from 2007. Engaged in researches for piezoelectric thin film pressure sensor, vibration sensor, biological information measurement sensor, and others. In this paper, was in charge of the fabrication of piezoelectric thin film, evaluation, and overall supervision.Tatsuo TabaruCompleted the doctorate course at the Graduate School of Engineering, Tohoku University in 1997. Doctor (Engineering). Researcher of the Core Research Institute, Institute for Material Research, Tohoku University in 1997. Special Researcher of Science and Technology, Japan Science and Technology Agency in 1999. Joined the Kyushu National Industrial Research Institute, Agency of Industrial Science and Technology (currently AIST Kyushu) in 1999. Visiting assistant professor, Graduate School, Saga University from 2006. Senior researcher, Measurement Solution Research Center, AIST from 2007. Engaged in researches for heat resistant alloy, oxidation resistant coating, heat resistant AE sensor, abnormal discharge detection, and friction and abrasion. In this paper, was mainly in charge of the high temperature property evaluation of the piezoelectric element.Kazushi KishiGraduated from the Industrial Chemistry, Faculty of Engineering, Ehime University in 1979. Joined the Fertilizer and Feed Inspection Station, Ministry of Agriculture, Forestry and Fisheries in 1979. Joined the Kyushu National Industrial Research Institute, Agency of Industrial Science and Technology in 1980. Currently, Senior researcher of the Process Measurement Team, Measurement Solution Research Center, AIST. Doctor of Engineering. In this paper, was in charge of the prototype fabrication, development of layer structure, and evaluation by engine.References[1]T. Kawa, Y. Aoyagi, T. Minagawa and S. Yanagihara: The Latest Technology of Pressure Sensors Applied to Internal Combustion Engines, Journal of Society of Automotive Engineers of Japan, 58, 31-36 (2004) (in Japanese).[2]T. Sugimoto: Annual report of Japanese ceramic industry 2002, Ceramics Japan, 38, 686-693 (2003) (in Japanese).[3]S. Uda, S. Q. Wang, N. Konishi, H. Inaba and J. Harada: Growth technology of piezoelectric langasite single crystal, J. Crystal Growth, 275, 251-258 (2005).[4]R. C. Turner, P. A. Fuierer, R. E. Newnham and T. R. Shrout: Materials for high temperature acoustic and vibration sensors: A review, Appl. Acoustics, 41, 299-324 (1994).[5]Y. Ooishi, H. Noma, K. Kishi, N. Ueno, M. Akiyama and T. Kamohara: Pressure response of aluminum nitride thin films prepared on silicon substrates, J. Ceram. Soc. Jpn., 113, 700-702 (2005).[6]Y. Ooishi, K. Kishi, M. Akiyama, H. Noma and T. Tabaru: Analysis of the basic characteristic by electrical model of aluminum nitride thin film pressure senseors, J. Ceram. Soc. Jpn., 113, 816-818 (2005). [7]T. Tabaru, H. Noma and M. Akiyama: 800 °C de dosa kano na tainetsu AE sensa no kaihatsu (Development of heat-resistant AE sensor operatable at 800 °C), Electro Heat, 30, 7-13 (2009) (in Japanese).[8]I. Ohshima, M. Akiyama, A. Kakami, T. Tabaru, T. Kamohara, Y. Ooishi and H. Noma: Piezoelectric response to pressure of aluminum nitride thin films prepared on nickel- based superalloy diaphragms, Jpn. J. Appl. Phys., 45, 5169- 5173 (2006).[9]Y. Ooishi, K. Kishi, M. Akiyama, H. Noma, T. Tabaru and D. Nishijima: High pressure and high temperature durability of aluminum nitride thin films prepared on Inconel substrates, J. Ceram. Soc. Jpn., 114, 657-659 (2006).[10]Y. Ooishi, K. Kishi, M. Akiyama, H. Noma, Y. Morofuji and S. Kawai: Combustion pressure sensors using c-axis-oriented aluminum nitride thin films prepared on Inconel substrates, J. Ceram. Soc. Jpn., 115, 344-347 (2007). [11]K. Kishi, M. Akiyama, Y. Ooishi and M. Inagaki: Piezoelectric element, piezoelectric sensor, manufacture method of piezoelectric element, and metal foil electrode parts, Patent No. 2008-142490 (in Japanese).[12]M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi and N. Kawahara: Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering, Adv. Mater., 21, 593- 596 (2009).AuthorsMorito AkiyamaCompleted the doctorate course at the Interdisciplinary Graduate School of Engineering Sciences, Kyushu University in 1993. Doctor (Engineering). Joined the Kyushu National Industrial Research Institute, Agency of Industrial Science and Technology (currently AIST Kyushu) in 1993. Visiting researcher at the University of Liverpool, UK in 1997. Leader of High Discussions with Reviewers1 Installation of combustion pressure sensor to the commercial automobileQuestion (Masahiro Okaji, Chino Corporation; Shuji Abe, AIST)(Subchapter 1.2) As an example of the installation of the combustion pressure sensor to the engine of mass-produced cars, you give the Toyota Motor’s piezoresistant sensor, but you also write, “This system is currently not used.” What was the reason that it was discontinued? Do you mean that this is the only case in the past, and there is no other example where it was installed in mass-produced cars (including foreign auto makers)?Answer (Morito Akiyama)I do not know the exact reason why Toyota Motor’s piezoresistant sensor was discontinued. After careful survey, I did find that the piezoresistant glow plug type combustion pressure sensor that was jointly developed by BorgWarner BERU Systems GmbH, a German spark plug company, and Texas Instruments Inc. of the United States had been installed in the green diesel

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