National Institute of Advanced Industrial Science and Technology (AIST)
Research resultsPublications > AIST TODAY > 2012-2 No.44
AIST TODAYNo.44 2012-2 [ PDF:7.7MB ]


For quantitative measurements of high and ultrahigh vacuum
- Development of standard conductance element -

[ PDF:945KB ]

A new element, named "standard conductance element (SCE)", has been developed for in situ calibration of ionization gauges and quadrupole mass spectrometers. The SCE is a stainless-steel sintered filter with a pore size of less than 1 μm. Since the gas flow through the SCE satisfies the molecular flow condition even at the pressure up to 104 Pa, several useful characteristics of molecular flow are available: (1) calibration for various gas species only with this single leak element, (2) easy multi-point calibration, (3) calibration for mixture gases, (4) small and theoretical temperature dependence of flow rate. These advantages were experimentally demonstrated. The SCE is supplied to users with a calibration certificate describing its molecular conductance. Users can introduce arbitrary test gases with the known flow rate to their vacuum chamber through the SCE in their laboratories.

Figure   Photo
Principle of standard conductance element (SCE)
 
Photograph of standard conductance element (SCE)

Relational Information
AIST TODAY Vol.12 No.2 p.17 (2012)


back imageback