One-dimensional (1D) gratings are one of the most important transfer standards for nanometrological instruments. National Metrology Institute of Japan (NMIJ) of AIST developed metrological atomic force microscopes (AFMs) and has supplied pitch calibration services (minimum pitch: 50 nm). Furthermore, a pitch calibration system based on the JCSS (Japan Calibration Service System) was also constructed with Japan Quality Assurance organization (JQA). JQA supplies pitch calibration services (minimum pitch: 97 nm) and the number of calibrations are a few hundred per year. Industry, however, requires calibration services for increasingly smaller pitches. This time, NMIJ has developed 1D gratings consisting of multilayer thin films and calibrated them. Furthermore, NMIJ conducted comparison measurements with the national metrology institute of Germany (PTB) using their own metrological AFMs. Based on the comparison results, NMIJ has expanded the minimum pitch calibration range to 23 nm. In the near future, the pitch calibration range of the JQA will be also expanded.