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AIST TODAYNo.41 2011-3 [ PDF:6MB ]


AIST's World-Class Carbon Nanotube-Related Research

Feature

Low-Temperature Synthesis of Graphene by Microwave Plasma CVD

Transparent conducting films (TCFs) have become highly important core materials used in LCDs, touch panels, solar cells, and other applications. Currently, indium tin oxide (ITO), which contains a rare metal, indium, is used in nearly all TCFs, and the development of alternative materials in order to prevent rising costs and supplement an unstable supply has become a necessity.

Graphene is a one-atom-thick sheet, composed of carbon atoms. Optical transparency over a broad wavelength, ranging from visible to infrared light, and high electrical conductivity are superb properties of graphene from an application point of view, and it is hoped that graphene-based TCFs will become an alternative to ITO-based TCFs.

Graphene was discovered by Dr. Andre Geim and Dr. Konstantin Novoselov of the University of Manchester in 2004, by attaching a piece of adhesive tape to a piece of graphite and peeling it off. The amount of graphene that could be obtained by this method was extremely limited, and it is apparent that a method of graphene synthesis applicable to the continuous large-area production was essential in order for it to be adapted for industrial use. Consequently, a chemical vapor deposition (CVD) method, which produces graphene on the surface of nickel and copper by pyrolyzing carbon-containing methane gas, was developed. This has made large-scale synthesis of graphene possible and increased the potential for industrial applications; however, the fact that this method requires the pyrolysis of methane gas to occur at 1000 °C makes continuous production difficult, and this remains a problem to be solved.

At the Nanotube Research Center, we have been working on technologies for low-temperature, large-area synthesis of nanocrystalline diamond thin films by applying our unique microwave plasma CVD equipment and method, and have been making efforts to modify this method for application to low-temperature, large-area CVD synthesis of graphene. We have succeeded in the synthesis of large-area graphene up to the size of A3 paper at a low temperature of 300 °C. We are now able to produce graphene-based TCFs that have a visible light transmittance of about 80 % and sheet resistance of 1 to 2 kΩ/sq. We have fabricated a test model of an electrostatic capacity-type touch panel by applying the graphene-based TCFs, and confirmed its performance (Figure 1). Figure 2 shows an A1-size graphene transparent sheet that was fabricated by connecting four A3-size sheets. We have been working on the development of roll-to-roll deposition technologies for graphene by improving our current method.

Figure 1

Fig. 1 Electrostatic capacity-type touch panel with graphene synthesized by microwave plasma CVD[1]


Fig. 2 A1-size (594×841 mm) transparent graphene sheet synthesized by microwave plasma CVD

Figure 2

Nanotube Research Center
Masataka HASEGAWA


Reference

[1] J. Kim et al.: Appl. Phys. Lett. 98, 091502 (2011)


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