We have developed an impedance analyzer system with a wide frequency range for evaluating ultralow impedance. The system can evaluate tens of micro-ohms of transfer impedance Z₂₁ in the frequency range of 10 Hz to 40 GHz.

To realize the future very low-power-consumption driving electronic circuit, power supply voltage is required to be lowered. Rapid current change causes instantaneous power supply voltage lowering when high-speed and simultaneous switching of a large number of transistors occurs. This is the high-frequency power supply noise in power distribution network (PND). It is required to reduce the power supply noise up to a high-frequency range by introducing the decoupling capacitors embedded interposers that show low PDN impedance. By developing the ultrawideband ultralow impedance evaluation system, it is expected that the accurate and wideband PDN impedance evaluation of the very low-power-consumption driving electronic circuit can be realized.