National Institute of Advanced Industrial Science and Technology (AIST)
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AIST TODAYNo.39 2011-1 [ PDF:9.4MB ]


Development of measuring instrument for thermal diffusivity of thin films
- Instrument for easy and fast measurement of thermophysical properties of thin films -

[ PDF:636KB ]

A measuring instrument for thermal diffusivity of thin films with thickness of around 1 µm has been developed based on a pulsed light heating thermoreflectance technique. The instrument observes transient temperature change at the surface of the film with 1 ns time resolution. One face of the substrate side of the thin film is heated by pulsed laser with the duration of 2 ns, and the temperature rise at the opposite face is detected by sensing reflectivity change of the film. For the observation of the reflectivity change of the film, a continuous wave laser diode is used instead of a pulsed laser for the conventional thermoreflectance measurements. We measured the thermal diffusivity of a titanium nitride film (680 nm) using the developed instrument, which coincided with the data obtained by the standard instrument of NMIJ, AIST. The developed instrument has several features: desktop size and short data acquisition time about 1 minute.

Figure
Transient temperature change for the titanium nitride thin film (thickness: 680 nm) obtained by the developed instrument along with that measured by the NMIJ standard instrument

Relational Information
AIST TODAY Vol.10 No.11 p.17 (2010)


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