A nebulizer is one of the most important components in plasma spectrometers such as ICP-OES and ICP-MS. Nowadays, application of ICP-OES and ICP-MS to the analysis of low volume samples and/or samples with high salt-concentration has rapidly grown especially in semiconductor, clinical, biological, and environmental research fields. We developed a high performance concentric nebulizer (HPCN) for ICP-OES and ICP-MS. HPCN has a semi-demountable triple tube concentric structure. HPCN shows an excellent performance for the following three points; highly efficient aerosol generation, high tolerance for total dissolved solids (TDS), easy designing for various flow rates of solutions. In the nebulization by HPCN, a microthread liquid flow is formed inside the nebulizer nozzle by a flow focusing effect. This phenomenon gives both the efficient aerosol generation and the high TDS tolerance. Now, we have applied HPCN to various research fields such as material, clinical, biological, and nuclear fuel analysis.
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