We have developed a fully automatic total fluorine-analyzing system with an unprecedented high level of sensitivity. This analyzing system is based on the conventional halogen analyzer that uses combustion ion chromatography (CIC). A higher level of sensitivity was achieved by replacing the fluorine-containing materials in part of the equipment and in the gas-supply line, which have the potential for fluorine contamination, with non-fluoropolymer materials and by using gases of higher purity for the sample combustion. Our new system permits the quantitative analysis of absolute amounts of 0.6 ng fluorine. The analyzer allows easy, rapid, and sensitive analyses of the total fluorine and organic fluorine compounds that are present in various environmental samples and industrial products. It can also be used to analyze compounds that contain chlorine or bromine. Thus, it is suitable for ensuring compliance with the EU RoHS directive and with potential future regulations on fluorinated compounds, such as the EU's REACH legislation.