By combining a metalorganic deposition (MOD) method with an excimer-laser annealing technique, we have developed a novel process, excimer-laser-assisted MOD (ELAMOD), to produce high-Tc oxide superconducting films (YBa₂Cu₃O₇: YBCO). The process realized the improvement of film characteristics as well as the enhancement of film production efficiency. In the production of epitaxial YBCO thin films, we have achieved critical current densities, Jc, of over six million A/cm², which is of the world's highest class. This value is comparable to or greater than those of superconducting thin films produced by high-cost physical processes. Our process enables the cost reduction and mass production of thin film devices, long tapes, large-area devices, etc.