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AIST TODAYNo.21 Summer 2006 [ PDF:4MB ]


Temperature measurement of microscale specimen by simultaneous measurements of thermoreflectance and electric resistance


A temperature measuring system based on the thermoreflectance method has been developed. This system can measure the temperature of sub-microscale specimen with non-contact, high temperature resolution, high speed, and high spatial resolution. Simultaneous measurements of a specimen in the relative intensity of reflected light and in the electric resistance allow us to determine its surface temperature. High spatial resolution of 0.7µm is achieved by employing laser irradiation and detection through confocal microscope optics. The minimum detectable temperature change of 0.2 ℃ at around 100℃ is obtained for a molybdenum thin strip.

Figure
Figure: Thermoreflectance thermometer using a confocal microscope system.

Relational Information
AIST TODAY Vol.6, No.5 (2006) p.30-31


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