Micro tubular SOFCs of ceria based electrolyte with 0.8-1.6 mm diameter have been fabricated using an advanced ceramic processing technology. SOFC stacks of high volumetric power density at 500 - 600 ℃ can be built with the micro tubes. The single tubular SOFC showed cell performance of 1W/cm² at 570℃ with H₂ fuel. The tubular SOFCs will be applied to a compact power device which can endure repeated rapid changes of electrical load and operating temperatures.