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AIST TODAYNo.20 Spring 2006 [ PDF:3.4MB ]

Contents List Message:The autonomy of research units andthe mission of AIST Feature:The 4th AIST Advisory Board meeting Research Hot Line In Brief

Traceable calibration for nanometrical step heights with AFMs

Step height standards are demanded in nano-manufacturing fields. NMIJ of AIST provides the calibration service for them since 2005 with a nanometrological AFM and an AFM with differential laser interferometers (DLI-AFM). In nanometric dimensional calibrations, microasperity and form deviation of object surfaces affect measurements. We have formulated a robust calibration method for nanometrical step height standards based on ISO 5436-1.
Figure 1
Figure 2
Figure 1: Instruments for nanometrical step calibration.
Figure 2: Microasperity on object surface.

Relational Information

AIST TODAY Vol.6 , No.3 (2006) p.20-21

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