A SiC-static induction transistors (SiC-SITs) with buried p+ gate regions by using hexagonal silicon carbide (4H-SiC) has been fabricated. The new SiC-SIT has breakdown voltage VBR 700 V and specific on-resistance RonS 1.01 mΩ·cm2, which is the smallest RonS in the world for switching devices of VBR 600 V~1.2 kV class. The SiC-SIT will reduce power loss extensively to 1/12 that of silicon insulated gate bipolar transistor (Si-IGBT).


