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AIST TODAYNo.16 Spring 2005 [ PDF:17.6MB ]


Density and thickness measurement of a thin-film by the pressure-of-flotation method


A new method for density and thickness measurements of a thin-film is proposed by a pressureof-flotation method (PFM). A density difference is determined by the PFM while a mass difference is measured by an electric balance for the samples before and after thin-film is prepared on a substrate (Fig). Then, the density and thickness of the thin-film on the substrate can be derived. The density and thickness of a molybdenum thin-film prepared on a silicon substrate are evaluated by this method. The estimated standard uncertainties of density and thickness for the molybdenum film are 3.8 % and 4.0 %, respectively.

Figure
Fig. Density and thickness measurement of a thin-film by density and mass comparisons.

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AIST Today Vol.5, No3 (2005-No.16) 30



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