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AIST TODAYNo.16 Spring 2005 [ PDF:17.6MB ]


Electrically conductive DLC coatings by plasma based ion implantation

Soji Miyagawa
Materials Research Institute for Sustainable Development
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Electrically conductive DLC(diamond-like carbon) coating technique has been developed by plasma based ion implantation with bipolar pulses. Energetic electrons and ions, which were induced by positive and negative pulses, respectively, were bombarded/deposited alternately on a substrate in hydrocarbon plasma. As a result, the resistivity of the DLC film decreased with the negative pulse voltage, and reached to 1 mΩcm at -20kV. Hardness of the film was 5.4GPa. TEM observation showed that the electrically conductive DLC films are composed of cluster of graphite-like aggregates. The technique can be applied for a metal separator in fuel batteries, where high conductivity and high electrochemical stability are needed.

Photo
Fig. Electrically conductive DLC film coated on a stainless steel substrate.

Relational Information

AIST Today Vol.5 , No.2 (2005-No.16) 23



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