Micro/Nano imprinting or hot embossing is a target of interest for industrial production of micro devices. In Fluidic MEMS (Micro Electro Mechanical Systems) applications, polymer materials have been employed for their low cost fabricate the economical products . However glasses are much more suitable for the higher temperature applications or under strong chemical environments. In Optical MEMS as well, glasses are good candidate materials for better optical properties. In this study, Micro/Nano hot embossing was employed for Pyrex glass molding and the test structures were successfully fabricated with good fidelity of 0.3µm line and space and 0.4µm height.