YBa
2Cu
3O
7-δ (YBCO) films was fabricated on CeO
2-buffered R-cut sapphire substrate by pulsed laser deposition. Prior to the YBCO deposition, a self-assembly process was performed where high-temperature (1025°C) O
2 annealing induces surface reconstruction of CeO
2 on sapphire substrates. The results reveal an atomically flat surface of CeO
2 film, superior crystalline quality, and the formation of a high density of nanodots on top of the CeO
2 layer (Fig.1). YBCO films grown on such CeO
2-buffered sapphire substrates had a high T
c ρ=0 (> 90 K) and a high
Jc (> 3.0 &Atimes; 10
6 A/cm
2 at 77.3 K and 0T, see Fig.2).