We have successfully prepared tin dioxide (SnO₂) film showing an excellent gas sensing property against hydrogen on polymer substrate through a liquid phase process. Due to the formation of an ultrathin silicon dioxide (thickness is 2 nm or less) layer prior to the SnO₂ film deposition, the resulting film was tightly attached to the polymer surface and readily bended without cracking. Furthermore, the SnO₂ film was successfully arranged spatially onto the photolithographically micropatterned organosilane layer on the polymer substrate. Our process demonstrated here is not limited to the patterning of SnO₂, but is also applicable to other inorganic materials.