We have succeeded in the development of a new ozone generator that
can supply 100% (over 93% at sample position) ozone gas, and its commercialization
through the collaboration with Meidensha Co. at the product name of
"Pure ozone generator". The outlook of the generator is
shown in Fig.1.
The generator adopts distillation process to obtain highly concentrated
ozone gas. That is, 5%-ozone/oxygen mixture gas generated by a commercial
ozonizer is let through an ozone vessel kept at 90K to accumulate
pure liquid ozone, with oxygen gas being evacuated by a vacuum pump.
Then the ozone vessel is heated to a selected temperature (usually
between 95K and 120K) to supply pure ozone gas having an equilibrium
vapor pressure at the temperature. The highest ozone pressure and
the maximum amount of ozone gas supplied with the generator are 2000Pa
and 3.7m3 (at 100Pa), respectively. The supplied ozone
flux is very stable, typically with 2% fluctuation, since the vessel
temperature is controlled with an accuracy of 0.1K,
|
 |
| Pure ozone generator which
has been put on sale since Dec. 2002 by Meidensha Co. |
|
| Relational Information |
|
|
AIST Today Vol. 3, No. 1 (2003) 24
|
No.8
Spring 2003
back
> 
