A micromixer array for continuous flow has been developed. The device is fabricated using micromachining technologies. The pattern of inlets, outlet and mixing chamber are formed in glass. The entire flow path is encapsulated by anodic bonding of a Si wafer to the glass. A bulk piezoelectric PZT ceramic is adhered on the backside of each mixing chamber. When a piezoelectric ceramic is excited by a 60kHz square wave, mixing occurs directly from the ultrasonic irradiation. Both qualitative and quantitative evaluations have been done. It shows an effective and reliable solution with fully controlling for integrated microchemical synthesis systems or for micro total analysis systems.
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| A 5-micromixer
array chip mounted on a testing socket. Each mixer has two inlets
and one outlet. The volume of each mixing chamber is 0.7μl. |
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| Relational Information |
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AIST Today Vol. 3, No. 2 (2003) 13
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No.8
Spring 2003
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