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AIST TODAYNo.8 Spring 2003


Development of a Ferroelectric Gate Memory FET with a Long Data Retention


A ferroelectric gate field effect transistor (FET) has been developed. A hafnium composite oxide has been used as a buffer layer between the silicon and ferroelectric SrBi2Ta2O9. Since this FET itself has functions of data storage and non-destructive read out, application to a next-generation memory was expected for a long time. However, the data retention properties reported so far were poor. The FET developed in AIST has superior data retention characteristics even after experiencing 12 days from the data entry. This success is a large breakthrough that opens up the way for the practical application to one transistor type ferroelectric random access non-volatile memory (1T-FeRAM).

Figure
Data retention characteristics of a ferroelectric gate memory FET

Relational Information

AIST Today Vol. 3, No. 1 (2003) 18



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