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The ZnO1-xSex compound semiconductor had been
grown by radical source MBE for the first time and we succeeded in
obtaining its large bandgap bowing parameter of 12.7eV. During this
research, some SIMS depth profile of Se concentration occurred to
show the formation of compositional ordering ZnO1-xSex
layers. (Fig.1a) The period of ZnO1-xSex natural
compositional ordering decreases with increasing Se concentration.
The relationship between the period of the ordered layers and the
Se concentration is consistent with Ferguson's theory. (Fig.1b) The
dynamics of the two-dimensional nature of the compositional alternations
of ZnO1-xSex can be explained by taking the
surface dynamic process of growth kinetics into consideration.
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| Fig.1 (a) Depth
profiles of Se concentration in ZnO1-xSex
thin films measured by SIMS and (b) the dependence of the natural
compositional ordered period on the Se incorporation. |
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| Relational Information |
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AIST Today Vol. 2, No. 11 (2002) 15
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