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AIST TODAYNo.7 Winter 2003


Natural Ordering Superlattice of ZnO1-xSex



The ZnO1-xSex compound semiconductor had been grown by radical source MBE for the first time and we succeeded in obtaining its large bandgap bowing parameter of 12.7eV. During this research, some SIMS depth profile of Se concentration occurred to show the formation of compositional ordering ZnO1-xSex layers. (Fig.1a) The period of ZnO1-xSex natural compositional ordering decreases with increasing Se concentration. The relationship between the period of the ordered layers and the Se concentration is consistent with Ferguson's theory. (Fig.1b) The dynamics of the two-dimensional nature of the compositional alternations of ZnO1-xSex can be explained by taking the surface dynamic process of growth kinetics into consideration.
Figure
Fig.1 (a) Depth profiles of Se concentration in ZnO1-xSex thin films measured by SIMS and (b) the dependence of the natural compositional ordered period on the Se incorporation.

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